Circular Crested Lamb Wave Resonator
A radio-frequency MEMS acoustic resonator that excites circular (rather than the conventional straight) crested Lamb waves in a piezoelectric thin-film plate. Because no transverse propagation direction exists, transverse spurious modes are eliminated, and the radial displacement attenuation concentrates energy at the device center to lower anchor loss and raise the quality factor. Demonstrated on scandium-doped aluminum nitride (Al0.8Sc0.2N) in the fundamental symmetric (S0) mode, it achieves a 40.7% Q improvement with no loss of effective electromechanical coupling versus a straight crested resonator, targeting next-generation RF filters and oscillators.
A Circular Crested Lamb Wave Resonator with Spurious Mode Suppression and Quality Factor
A microfabricated radio-frequency MEMS device paper that demonstrates, for the first time, a circular crested Lamb wave resonator (LWR). Conventional LWRs are straight crested: they use rectangular i…