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Photonic-Crystal Resonator Frequency Combs in a Silicon-Nitride Foundry

Foundry-scale fabrication of silicon-nitride photonic-crystal microresonators whose subwavelength ring-width modulation controls mode splitting and phase-matching, enabling low-loss high-Q resonators that generate optical parametric oscillators and soliton frequency combs on a scalable photonics platform.

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Letter 1 Implementing photonic-crystal resonator frequency combs in a photonics foundry HAIXIN

This experimental Letter demonstrates photonic-crystal resonators (PhCRs) fabricated entirely in a commercial silicon-nitride photonics foundry (AIM Photonics, 300 mm silicon wafers, 700 nm Si3N4 dev…